Optical element arrangements for varying beam parameter product in laser delivery systems
AssigneePanasonic Connect North America, Division of Panasonic Corporation of North America
InventorsWang-Long Zhou, Parviz Tayebati, Bien Chann, Francisco Villarreal-Saucedo
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Abstract
In various embodiments, laser delivery systems feature one or more optical elements for receiving a radiation beam and altering the spatial power distribution thereof, a lens manipulation system for changing a position of at least one optical element within the path of the radiation beam, and a controller for controlling the lens manipulation system to achieve a target altered spatial power distribution on a workpiece.
Claims52
A laser delivery system for receiving and altering a spatial power distribution of a radiation beam from a beam source and focusing the radiation with the altered spatial power distribution onto a workpiece, the system comprising:
- a triplet collimator for increasing a divergence of the radiation beam;
- disposed optically downstream of the triplet collimator, a focusing lens for receiving the radiation beam and focusing the beam toward the workpiece;
- disposed optically upstream of the focusing lens, at least one optical element for receiving the radiation beam and altering the spatial power distribution thereof;
- a lens manipulation system for changing a position of the at least one optical element within a path of the radiation beam;
- and
- a controller for controlling the lens manipulation system to achieve a target altered spatial power distribution on the workpiece,
- wherein the triplet collimator comprises (i) a first plano-concave lens, (ii) a second meniscus lens, and (iii) a third plano-convex lens.
A laser delivery system for receiving and altering a spatial power distribution of a radiation beam from a beam source and focusing the radiation with the altered spatial power distribution onto a workpiece, the system comprising:
- a triplet collimator for increasing a divergence of the radiation beam;
- disposed optically downstream of the triplet collimator, a focusing lens for receiving the radiation beam and focusing the beam toward the workpiece;
- disposed optically upstream of the focusing lens, at least one optical element for receiving the radiation beam and altering the spatial power distribution thereof;
- a lens manipulation system for changing a position of the at least one optical element within a path of the radiation beam;
- and
- a controller for controlling the lens manipulation system to achieve a target altered spatial power distribution on the workpiece,
- wherein the at least one optical element comprises a lens having (i) a first surface having the shape of a truncated cone, and (ii) opposite the first surface, a second surface that is substantially planar.
A laser delivery system for receiving and altering a spatial power distribution of a radiation beam from a beam source and focusing the radiation with the altered spatial power distribution onto a workpiece, the system comprising:
- a triplet collimator for increasing a divergence of the radiation beam;
- disposed optically downstream of the triplet collimator, a focusing lens for receiving the radiation beam and focusing the beam toward the workpiece;
- disposed optically upstream of the focusing lens, at least one optical element for receiving the radiation beam and altering the spatial power distribution thereof;
- a lens manipulation system for changing a position of the at least one optical element within a path of the radiation beam;
- and
- a controller for controlling the lens manipulation system to achieve a target altered spatial power distribution on the workpiece,
- wherein the lens manipulation system is configured to position at least one said optical element transversely off-center within the path of the radiation beam.
A laser delivery system for receiving and altering a spatial power distribution of a radiation beam from a beam source and focusing the radiation with the altered spatial power distribution onto a workpiece, the system comprising:
- a triplet collimator for increasing a divergence of the radiation beam;
- disposed optically downstream of the triplet collimator, a focusing lens for receiving the radiation beam and focusing the beam toward the workpiece;
- disposed optically upstream of the focusing lens, at least one optical element for receiving the radiation beam and altering the spatial power distribution thereof, the at least one optical element comprising a first optical element and a second optical element;
- a lens manipulation system configured to change at least one of (i) a position of the first optical element within a path of the radiation beam, (ii) a position of the second optical element within the path of the radiation beam, or (iii) a distance between the first and second optical elements;
- and
- a controller for controlling the lens manipulation system to achieve a target altered spatial power distribution on the workpiece.
Dependencies are inferred from the claim text.