Micromachined mirror assembly having micro mirror array and hybrid driving method thereof
AssigneeBeijing Voyager Technology Co., Ltd.
InventorsQin Zhou, Youmin Wang
Life of this patent
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Abstract
Embodiments of the disclosure provide micromachined mirror assemblies and hybrid driving methods thereof. In one example, a micromachined mirror assembly includes a base and an array of micro mirrors affixed on the base. The base is configured to tilt around a base tilting axis. Each micro mirror in the array of micro mirrors is configured to tilt around a respective mirror tilting axis. Each of the mirror tilting axes is parallel to one another and is nonparallel to the base tilting axis.
Claims20
A scanning mirror assembly of an optical sensing system, comprising:
- a frame comprising:
- a first post and a second post arranged in parallel and separated by a gap;
- and
- a set of beams coupled perpendicularly to the first post and positioned in the gap between the first post and the second post;
- and
- an array of micro mirrors coupled to the frame, wherein the array of micro mirrors tilt in a synchronized manner around a mirror tilting axis when the first post and the second post are positioned in different vertical planes.
A scanner of an optical sensing system, comprising:
- a scanning mirror assembly comprising:
- a frame comprising:
- a first post and a second post arranged in parallel and separated by a gap;
- and
- a set of beams coupled perpendicularly to the first post and positioned in the gap between the first post and the second post;
- and
- an array of micro mirrors coupled to the frame wherein the array of micro mirrors tilt in a synchronized manner around a mirror tilting axis when the first post and the second post are positioned in different vertical planes;
- and
- a first driver configured to drive the array of micro mirrors to tilt in the synchronized manner around the mirror tilting axis by causing the second post to be raised and lowered.
A transmitter of an optical sensing system, comprising:
- a light source configured to emit a laser beam;
- and
- a scanner configured to steer the laser beam towards an object, wherein the scanner comprises:
- a scanning mirror assembly comprising:
- a frame comprising:
- a first post and a second post arranged in parallel and separated by a gap;
- and
- a set of beams coupled perpendicularly to the first post and positioned in the gap between the first post and the second post;
- and
- an array of micro mirrors coupled to the frame wherein the array of micro mirrors tilt in a synchronized manner around a mirror tilting axis when the first post and the second post are positioned in different vertical planes.
Dependencies are inferred from the claim text.