Silicon photonics device for LIDAR sensor and method for fabrication

A LIDAR sensor for a vehicle, the LIDAR sensor comprising:

• a silicon photonics device, the silicon photonics device including:
• a substrate member;
• a silicon-on-insulator (SOI) layer formed on the substrate member;
• and
• a first antenna of the LIDAR sensor formed on the substrate member, the first antenna including:
• a first grating structure in the SOI layer coupled to the substrate member;
• a first dielectric structure coupled to the first grating structure;
• and
• a first metal layer coupled to the first dielectric structure.

An autonomous vehicle control system comprising:

• a silicon photonics device for a LIDAR sensor of a vehicle, the silicon photonics device including:
• a substrate member;
• a silicon-on-insulator (SOI) layer formed on the substrate member;
• and
• an antenna of the LIDAR sensor formed on the substrate member, the antenna including:
• a first grating structure in the SOI layer coupled to the substrate member;
• a first dielectric structure coupled to the first grating structure;
• and
• a first metal layer coupled to the first dielectric structure.