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US 11,906,549 B1Granted
Compliant pin probes with flat extension springs, methods for making, and methods for using
AssigneeMicrofabrica Inc.
InventorMing Ting Wu
Life of this patent
Estimating the term…
Abstract
Embodiments are directed to probe structures, arrays, methods of using probes and arrays, and/or methods for making probes and/or arrays wherein the probes include at least one flat tensional spring segment.
Claims15
A probe for testing a device under test (DUT), comprising:
- (a) a first tip for making electrical contact to an electrical circuit element, the first tip having a contact region and an attachment region;
- (b) a first extension arm connecting directly or indirectly to the attachment region of the first tip;
- (c) a compliant structure comprising at least one spring segment, wherein a first region of the compliant structure joins the first extension arm;
- (d) a second extension arm joining a second region of the compliant structure such that relative displacement of the first and second extension arms results in elastic movement of the at least one spring segment of the compliant structure;
- (e) a second tip having a first attachment region and a second region wherein the first attachment region of the second tip joins the second extension arm;
- and
- (f) a guidance structure that limits elastic movement of the compliant structure to substantially longitudinal movement along a longitudinal axis of the probe,
- wherein the at least one spring segment operates under tension to provide an elastic restoration force,
- wherein the second region of the second tip is configured for making an electrical connection to a second circuit element, wherein the configuration is selected from a group consisting of:
- (1) a tip for making a contact connection, and (2) a tip for making an attached connection,
- wherein the probe further comprises at least two movable stop structures to allow pre-biasing of the at least one spring segment, and
- wherein the at least two movable stop structures each include a respective opening through which one of the first extension arm or the second extension arm can pass.
9 more elements
A probe for testing a device under test (DUT), comprising:
- (a) a first tip for making electrical contact to an electrical circuit element, the first tip having a first contact region and a first connection region;
- (b) a first extension arm connecting directly or indirectly to the first connection region of the first tip;
- (c) a compliant structure comprising at least one spring segment, and wherein a first region of the compliant structure connects directly or indirectly to the first extension arm;
- (d) a second extension arm connecting directly or indirectly to a second connection region of the compliant structure such that relative displacement of the first extension arm and the second extension arm results in elastic movement of the at least one spring segment of the compliant structure;
- (e) a second tip having a first connection region and a second region wherein the first connection region joins the second extension arm;
- and
- (f) at least one guidance element that limits relative movement of the first tip and the second tip along a substantially longitudinal axis of the probe,
- wherein the at least one spring segment undergoes increased extension upon relative displacement of the first tip and the second tip toward one another along a longitudinal axis of the probe,
- wherein the second region of the second tip is configured for making an electrical connection to a second circuit element, wherein the configuration is selected from a group consisting of:
- (1) a tip for making a contact connection, and (2) a tip for making an attached connection,
- wherein the probe further comprises at least two movable stop structures to allow pre-biasing of the at least one spring segment, and
- wherein the at least two movable stop structures each include a respective opening through which one of the first extension arm or the second extension arm can pass.
9 more elements
A probe for testing a device under test (DUT), comprising:
- (a) a first tip for making electrical contact to an electrical circuit element, the first tip having a first contact region and a first connection region;
- (b) a first extension arm connecting directly or indirectly to the first connection region of the first tip;
- (c) a compliant structure comprising at least one spring segment, and wherein a first region of the compliant structure connects directly or indirectly to the first extension arm;
- (d) a second extension arm connecting directly or indirectly to a second connection region of the compliant structure such that relative displacement of the first extension arm and the second extension arm results in elastic movement of the at least one spring segment of the compliant structure;
- and
- (e) a second tip having a first connection region and a second region wherein the first connection region joins the second extension arm,
- wherein the at least one spring segment undergoes increased extension upon relative displacement of the first tip and the second tip toward one another along a longitudinal axis of the probe,
- wherein the second region of the second tip is configured for making an electrical connection to a second circuit element, wherein the configuration is selected from a group consisting of:
- (1) a tip for making a contact connection, and (2) a tip for making an attached connection,
- wherein the probe further comprises at least two movable stop structures to allow pre-biasing of the at least one spring segment, and
- wherein the at least two movable stop structures each include a respective opening through which one of the first extension arm or the second extension arm can pass.
8 more elements
Dependencies are inferred from the claim text.