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US 11,906,495 B2Granted
Sensor and method for calibrating sensor
AssigneeKabushiki Kaisha Toshiba
InventorsYumi Hayashi, Hiroaki Yamazaki
Life of this patent
Estimating the term…
Abstract
According to one embodiment, a sensor includes a sensor part including a first film, and a structure body including a second film. The first film has a first density, and a first concentration of a first element. The second film has at least one of a second density, or a second concentration of the first element. The second concentration is greater than the first concentration. The second density is greater than the first density.
Claims15
A sensor, comprising:
- a sensor part including a first film;
- a structure body including a second film;
- a first member including a first surface;
- and
- a second member including a second surface facing the first surface,
- the first film having a first density,
- the second film having a second density being greater than the first density,
- the second member including a hole,
- the structure body being provided at the second surface,
- the sensor part being provided at the first surface,
- wherein
- the sensor part overlaps the hole in a direction from the first member toward the second member, and
- the structure body does not overlap the hole in the direction.
10 more elements
A sensor, comprising:
- a sensor part including a first film;
- a structure body including a second film;
- a first member;
- and
- a second member including a hole,
- the first film having a first density,
- the second film having a second density being greater than the first density,
- the sensor part and the structure body being provided between the first member and the second member,
- a direction from the sensor part to the hole crossing a direction from the sensor part to the structure body, and
- a distance between the hole and the sensor part being less than a distance between the hole and the structure body.
7 more elements
Dependencies are inferred from the claim text.