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US 11,906,457 B2Granted
Light-activated gas sensor based on 3D nanostructure operable at low temperature with high performance and method for manufacturing the same
AssigneeKorea Advanced Institute of Science and Technology
InventorsSeokwoo Jeon, Donghwi Cho, Youngsuk Shim
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Abstract
A gas sensor includes a first electrode disposed on a substrate, a second electrode disposed on the substrate and spaced apart from the first electrode, and a sensitive member disposed on the substrate. The sensitive member contacts first and second electrodes and has a porous structure from a three-dimensional (3D) arrangement of shells including a gas-sensitive material. A thickness of the sensitive member is 5 μm to 10 μm, and a thickness of the shells is 10 nm to 40 nm.
Claims4
A light-activated gas sensor comprising:
- a first electrode disposed on a substrate;
- a second electrode disposed on the substrate and spaced apart from the first electrode;
- and
- a sensitive member disposed on the substrate and contacting the first and second electrodes and having a nano-shell structure with three-dimensional (3D) network shape, the nano-shell structure including a plurality of nano-shells respectively having a 3D layer shape to define and surround pores that are ordered with periodicity and connected to each other, the sensitive member including a metal oxide semiconductor as a gas-sensitive material,
- wherein a thickness of the sensitive member is 5 μm to 10 μm, and a thickness of the shells is 10 nm to 40 nm.
2 more elements
Dependencies are inferred from the claim text.