Optical system for imaging enabling high resolution

An optical system for imaging, which focuses inspection light and monitoring light on an inspection target, the optical system comprising:

• a dioptric group configured to receive inspection light and monitoring light and to primarily focus the inspection light and the monitoring light on different locations;
• and
• a reflection dioptric group configured to reflect and refract the inspection light and the monitoring light that have passed through the dioptric group and to bring the inspection light and the monitoring light into one focus,
• wherein the inspection light and the monitoring light have different wavelength bands within a UV-C wavelength band,
• each of one lens within the dioptric group and one lens within the reflection dioptric group is implemented as a vitreous fluoride material,
• the dioptric group comprises some or all of first to fifth lenses, and
• the reflection dioptric group comprises:
• an eighth lens has a form in which both ends of the eighth lens are bent toward a point on which light is to be focused;
• a sixth lens has a form in which both ends of the sixth lens are bent toward the eighth lens, comprises a hollow, and has a mirror surface on one surface thereof;
• and
• a seventh lens is disposed in a rear of the sixth lens in a direction in which light is incident, reflects the light that has passed through the dioptric group, and transmits light that is incident thereon after being reflected by the mirror surface of the sixth lens.