Inspection device and inspection method

An inspection method, comprising:

• acquiring pattern information for a plurality of inspection areas on an inspection target;
• calculating pre-charging irradiation amounts for the plurality of inspection areas based on the pattern information;
• controlling a plurality of first beams to supply the calculated pre-charging irradiation amounts for each of the plurality of inspection areas at the same time using a corresponding one of the plurality of first beams, respectively;
• after supplying the calculated pre-charging irradiation amount to at least one of the plurality of inspection areas, irradiating at least one of the plurality of inspection areas with one of a plurality of second beams after the pre-charging irradiation;
• and
• generating images of each of the plurality of inspection areas based on the irradiation of the plurality of inspection areas with the plurality of second beams.

An inspection method, comprising:

• acquiring design data of a pattern formed on an inspection target;
• acquiring material characteristics information for the inspection target;
• generating a pre-irradiation map based on the acquired design data and material characteristic information, the pre-irradiation map indicating a pre-charging irradiation amount for each of a plurality of inspection areas on the inspection target;
• performing a pre-charging irradiation on the plurality of inspection areas according to the pre-irradiation map using a respective first beam from a plurality of first beams for each of the plurality of inspection areas, the pre-charging irradiation being performed at the same time for each of the plurality of inspection areas using the plurality of first beams;
• irradiating each of the plurality of inspection areas to acquire image data from each of the plurality of inspection areas;
• and
• generating an image of the inspection target from the acquired image data from the plurality of inspection areas.