Optical inspection method, non-transitory storage medium storing optical inspection program, and optical inspection apparatus

A non-transitory storage medium storing an optical inspection program, the optical inspection program causing a computer to implement:

• by using an optical apparatus configured to emit a light beam having a first wavelength and a light beam having a second wavelength different from the first wavelength in a single direction toward an imaging unit in accordance with a light beam direction from a subject, with a light beam intensity of the first wavelength and a light beam intensity of the second wavelength being in a complementary relationship, acquiring image data including information of a first image related to the first wavelength and information of a second image related to the light beam having the second wavelength with the imaging unit,
• separating the image data into the information of the first image and the information of the second image,
• comparing the information of the first image and the information of the second image, and
• extracting unevenness information of the subject,
• wherein the complementary relationship is a relationship in a certain pixel of the imaging unit, in which:
• when the light beam intensity of the first wavelength is increased, the light beam intensity of the second wavelength is weakened in the same certain pixel, or
• when the light beam intensity of the second wavelength is increased, the light beam intensity of the first wavelength is weakened in the same certain pixel.

An optical inspection apparatus comprising:

• an image forming optical system that forms an image of a light beam from a subject;
• an imaging unit provided on an image forming plane of the image forming optical system;
• a color filter that is provided on a focal plane of the image forming optical system between the image forming optical system and the imaging unit,
• the color filter being configured to:
• emit a light beam having a first wavelength and a light beam having a second wavelength different from the first wavelength in a single direction toward the imaging unit in accordance with a light beam direction from the subject in a state in which a light beam intensity of the first wavelength and a light beam intensity of the second wavelength have a complementary relationship, and
• causes the imaging unit to acquire image data including ach of information of a first image related to the light beam having the first wavelength and information of a second image related to the light beam having the second wavelength;
• and
• a processor configured to extract unevenness information of the subject by comparing the information of the first image with the information of the second image,
• wherein the complementary relationship is a relationship in a certain pixel of the imaging unit, in which:
• when the light beam intensity of the first wavelength is increased, the light beam intensity of the second wavelength is weakened in the same certain pixel, or
• when the light beam intensity of the second wavelength is increased, the light beam intensity of the first wavelength is weakened in the same certain pixel.

An optical inspection apparatus, comprising:

• a camera including an image sensor configured to:
• acquire image data by the image sensor, the image data including:
• a light beam having a first wavelength in accordance with a first scattering angle from a subject as information of a first image, and
• a light beam having a second wavelength different from the light beam having the first wavelength as information of a second image in accordance with a second scattering angle different from the first scattering angle from the subject, and
• acquire a light beam intensity of the first wavelength and a light beam intensity of the second wavelength as a complementary relationship by the image sensor;
• and
• a processor configured to extract surface information of the subject by comparing the information of the first image and the information of the second image,
• wherein the complementary relationship is a relationship in a certain pixel of the imaging unit, in which:
• when the light beam intensity of the first wavelength is increased, the light beam intensity of the second wavelength is weakened in the same certain pixel, or
• when the light beam intensity of the second wavelength is increased, the light beam intensity of the first wavelength is weakened in the same certain pixel.