Raman spectroscopy based measurement system

A system for measuring one or more characteristics of a patterned structure, the system comprising:

• a control system;
• and
• a measurement system that comprises an illumination unit and a detection unit;
• wherein the illumination unit is configured and operable to illuminate the patterned structure to cause Raman scattering of one or more excited regions of the patterned structure and to cause a controllable change of a temperature condition of the patterned structure;
• wherein the detection unit comprises at least one optical detector configured and operable to collect the Raman scattering of the structure while under the controllable change of the temperature condition, and generate corresponding measured data;
• and
• wherein the control system is configured to be in data communication with the measurement system, to monitor the temperature condition of the patterned structure, to receive the measured data, and to utilize the measured data to generate data indicative of a spatial profile of at least one property of the patterned structure;
• wherein the measured data is a temperature dependent Raman response of the patterned structure, and wherein the control system is configured and operable to monitor the temperature condition by analyzing the temperature dependent Raman response of the patterned structure and determine the controlled change of the temperature condition from a variation of at least one of (a) Raman scattering peak intensity, (b) Raman scattering peak wavelength, or (c) Raman scattering peak width.