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US 11,906,422 B2Granted
Compact photoacoustic detection device
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsEmmanuel Ollier, Caroline Coutier, Laurent Duraffourg, Thierry Verdot
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Abstract
The invention relates to a device for detecting a gaseous species by photoacoustic effect. The device comprises a substrate, inside which a cavity is formed. A light source is disposed on the substrate, in such a way that a part of the substrate extends between the light source and the cavity. The device is arranged in such a way that the light, emitted by the light source, is propagated through the substrate, before reaching the cavity.
Claims14
A photoacoustic detection device, comprising:
- a light source, configured to emit a light beam about an illumination axis;
- a cavity, configured to receive a gas;
- a detector, configured to detect an acoustic wave being propagated through the cavity;
- the device comprising a substrate, extending between a bottom face and a top face, wherein the substrate is such that:
- the cavity is formed in the substrate, between the bottom face and the top face;
- a trench is formed in the substrate, the trench being delimited by the top face, the light source being inserted into the trench, on the top face, so that the top face thus extends between the cavity and the light source;
- the substrate comprises an illumination portion, delimiting the trench, disposed facing the light source, the illumination portion extending between:
- a proximal face, formed on the top face, disposed opposite the light source;
- and a distal face, formed on the top face, the distal face forming a reflector configured to reflect the light towards the cavity;
- such that the light beam, emitted by the light source, is propagated, through the illumination portion, between the proximal face and the distal face, before being reflected, by the distal face, towards the cavity.
7 more elements
Dependencies are inferred from the claim text.