Pressure sensor and electronic equipment
AssigneeMurata Manufacturing Co., Ltd.
InventorHiroaki Kitada
Life of this patent
Estimating the term…
Abstract
A pressure sensor that includes a piezoelectric film having a first main surface and a second main surface, a first electrode on the first main surface of the piezoelectric film, and a second electrode on the second main surface of the piezoelectric film. At least one of the first electrode and the second electrode is formed of a material having an elastic modulus of 60 GPa or more, and the product of a thickness of the at least one of the first electrode and the second electrode in a stacking direction of the pressure sensor multiplied by an elastic modulus of the at least one of the first electrode and the second electrode is 4 MPa·m or more.
Claims20
A pressure sensor comprising:
- a piezoelectric film having a first main surface and a second main surface;
- a first electrode on the first main surface of the piezoelectric film;
- and
- a second electrode on the second main surface of the piezoelectric film,
- wherein
- at least one of the first electrode and the second electrode is formed of a material having an elastic modulus of 60 GPa or more, and a product of a thickness of the least one of the first electrode and the second electrode in a stacking direction of the pressure sensor multiplied by the elastic modulus of the least one of the first electrode and the second electrode is 4 MPa*m or more.
Electronic equipment comprising:
- a substrate having an elastic modulus of 1 MPa or less;
- and
- a pressure sensor bonded to the substrate, the pressure sensor comprising:
- a piezoelectric film having a first main surface and a second main surface;
- a first electrode on the first main surface of the piezoelectric film;
- and
- a second electrode on the second main surface of the piezoelectric film,
- wherein
- at least one of the first electrode and the second electrode is formed of a material having an elastic modulus of 60 GPa or more, and a product of a thickness of the least one of the first electrode and the second electrode in a stacking direction of the pressure sensor multiplied by the elastic modulus of the least one of the first electrode and the second electrode is 4 MPa*m or mroe.
Dependencies are inferred from the claim text.