Substrate temperature sensor, substrate retainer and substrate processing apparatus
AssigneeKokusai Electric Corporation
InventorsTokunobu Akao, Hitoshi Murata, Akinori Tanaka, Masaaki Ueno
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Abstract
According to one aspect of the technique, there is provided a substrate temperature sensor configured to measure a temperature of a substrate, wherein the substrate temperature sensor is provided in a protective pipe passing through a notch provided at least in a bottom plate of a substrate retainer inserted into a process chamber in a state where the substrate is mounted on the substrate retainer.
Claims16
A substrate temperature sensor configured to measure a temperature of a substrate,
- wherein the substrate temperature sensor is provided in a protective pipe passing through a notch provided at least in a bottom plate of a substrate retainer inserted into a process chamber in a state where the substrate is mounted on the substrate retainer.
A substrate retainer configured to be inserted into a process chamber in a state where a substrate is mounted on the substrate retainer, comprising
- a protective pipe passing through a notch provided at least in a bottom plate of the substrate retainer and capable of accommodating a substrate temperature sensor configured to measure a temperature of the substrate.
A substrate processing apparatus comprising:
- a process chamber in which a substrate is accommodated;
- a substrate temperature sensor configured to measure a temperature of the substrate;
- a protective pipe configured to accommodate the substrate temperature sensor;
- and
- a substrate retainer in which the protective pipe passes through a notch provided at least in a bottom plate thereof.
Dependencies are inferred from the claim text.