Modulation device, control device, optical system, lithography system and method
AssigneeCarl Zeiss SMT GmbH
InventorsCornelius Richt, Mohammad Awad
Life of this patent
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Abstract
A modulation device includes: a signal splitter configured to generate: i) an M-bit wide partial signal comprising M more significant bits of an N-bit wide input signal; and ii) an L-bit wide partial signal comprising L less significant bits of the N-bit wide input signal, where L=N−M; a first modulation unit configured to generate a 1-bit wide pulse density modulation signal on the basis of the L-bit wide partial signal; a summation unit configured to generate an M-bit wide summation signal on the basis of the M-bit wide partial signal and the 1-bit wide pulse density modulation signal; and a second modulation unit configured to generate a 1-bit wide pulse width modulation signal on the basis of the M-bit wide summation signal.
Claims21
A drive device, comprising:
- a modulation device configured to generate a 1-bit wide pulse width modulation signal on the basis of an N-bit wide input signal;
- an amplifier unit configured to generate an amplified signal on the basis of the 1-bit wide modulation signal;
- a filter unit configured to filter the amplified signal and to output the filtered signal to drive an actuator;
- and
- a first unit configured to generate the N-bit wide input signal on the basis of a drive signal, wherein the first unit is configured to generate the input signal on the basis of at least one member selected from a group consisting of:
- i) a high-voltage feedback of a voltage supply of the amplifier unit;
- and ii) a drive voltage feedback of the filtered signal.
A method, comprising:
- generating an N-bit wide input signal on the basis of:
- a drive signal;
- and at least one member selected from a group consisting of:
- 1) a high-voltage feedback of a voltage supply of an amplifier unit and ii) a drive voltage feedback of a filtered signal
- generating a 1-bit wide pulse width modulation signal on the basis of the N-bit wide input signal;
- generating amplified and filtered signals on the basis of the 1-bit wide pulse width modulation signal;
- and
- driving actuatable optical elements of an optical system on the basis of the amplified and filtered modulation signals.
Dependencies are inferred from the claim text.