Vacuum pump and linked-type thread groove spacer
AssigneeEdwards Japan Limited
InventorsKengo Saegusa, Nahoko Yoshihara, Yoshinobu Ohtachi
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AssigneeEdwards Japan Limited
InventorsKengo Saegusa, Nahoko Yoshihara, Yoshinobu Ohtachi
Estimating the term…
A vacuum pump which can prevent lowering of an exhaust performance of the vacuum pump, even if a linked-type thread groove spacer is fastened by a fixing bolt, is provided. The linked-type thread groove spacer according to an embodiment of the present invention includes a structure for linking a Siegbahn pump portion and a thread-groove pump portion. When this linked-type thread groove spacer is to be fastened, a countersunk hole is provided in advance in an exhaust channel portion, and the linked-type thread groove spacer is fastened to a base by a fixing bolt. As a result, a head part of the fixing bolt does not protrude to the exhaust channel, and the head part of the fixing bolt does not make resistance against an exhaust gas. Thus, lowering of the exhaust performance of the vacuum pump can be suppressed.
A vacuum pump comprising:
A linked-type thread groove spacer which is used in a vacuum pump having a casing in which an inlet port or an outlet port is formed, and a stator component enclosed in the casing, the linked-type thread groove spacer comprising:
Dependencies are inferred from the claim text.