Shielding device and thin-film-deposition equipment with the same

A thin-film-deposition equipment, comprising:

• a reaction chamber comprising a containing space;
• a carrier disposed within the containing space for carrying at least one substrate thereon;
• and
• a shielding device comprising:
• a first-shield member that is disposed within the containing space and that has a first-inner-edge surface disposed with at least one protrusion;
• a second-shield member that is disposed within the containing space and that has a second-inner-edge surface disposed with at least one cavity corresponding to the at least one protrusion of the first-inner-edge surface of the first-shield member;
• and
• a driver that interconnects and drives the first-shield member and the second-shield member to respectively sway in opposite directions between an open state and a shielding state, wherein in the shielding state, the first-inner-edge surface of the first-shield member and the second-inner-edge surface of the second-shield member are adjacent to each other with the at least one protrusion of the first-shield member entering the at least one cavity of the second-shield member, such that the first-shield member and the second-shield member together cover the carrier.