Ceramic sintered body and substrate for semiconductor device
AssigneesNGK Insulators, Ltd., Ngk Electronics Devices, Inc.
InventorsYuji Umeda, Jyunji Oogami
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AssigneesNGK Insulators, Ltd., Ngk Electronics Devices, Inc.
InventorsYuji Umeda, Jyunji Oogami
Estimating the term…
In a ceramic sintered body, the Zr content is 17.5 mass %-23.5 mass % in terms of ZrO2, the Hf content is 0.3 mass %-0.5 mass % in terms of HfO2, the Al content is 74.3 mass %-80.9 mass % in terms of Al2O3, the Y content is 0.8 mass %-1.9 mass % in terms of Y2O3, the Mg content is 0.1 mass %-0.8 mass % in terms of MgO, the Si content is 0.1 mass %- and 1.5 mass % in terms of SiO2, and the Ca content is 0.03 mass %-0.35 mass % in terms of CaO. The total content of Na and K is 0.01 mass %-0.10 mass %, when the K content is converted to K2O and the Na content is converted to Na2O. The balance content is 0.05 mass % or less in terms of oxide.
A ceramic sintered body joined to a copper plate or an aluminum plate, wherein
A substrate for a semiconductor device on which electronic components mounted, the substrate comprising:
Dependencies are inferred from the claim text.