Method for producing ultrapure water, ultrapure water production system, and ion exchanger-filled module

A method for producing ultrapure water to supply, to a use point, the ultrapure water obtained by treating raw material water for ultrapure water production in an ultrapure water production apparatus,

• wherein the raw material water for ultrapure water production contains metal impurities of both of:
• at least one element selected from the group consisting of B and As, and
• at least one element selected from the group consisting of Al, Ti, Cr, Fe, Cu, Zn, Sn, V, Ga, and Pb,
• wherein an ion exchanger-filled module filled with at least a monolithic organic porous anion exchanger is installed in a treatment path of the ultrapure water production apparatus or in a transfer path from the ultrapure water production apparatus to the use point, and the raw material water to be treated is passed through the ion exchanger-filled module for treatment, and
• wherein the raw material water to be treated is passed through the monolithic organic porous anion exchanger-filled module at a water passing speed SV of greater than or equal to 1274 h−1 and less than or equal to 20000 h−1 to remove the metal impurities from the raw material water and produce the ultrapure water.