Electrical contacting and method for producing an electrical contacting
AssigneeRobert Bosch GmbH
InventorsJochen Reinmuth, Markus Kuhnke, Stefan Majoni, Timo Schary
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AssigneeRobert Bosch GmbH
InventorsJochen Reinmuth, Markus Kuhnke, Stefan Majoni, Timo Schary
Estimating the term…
An electrical contacting between a surrounding wiring and a conductor region. The conductor region is situated in a conductor layer above an SOI wafer or SOI chip. A cover layer is situated above the conductor layer and below the surrounding wiring. The cover layer has a contacting region. The contacting region is insulated from the rest of the cover layer by a first configuration of recesses. An opening is formed at least in the contacting region. A metallic material is situated in the opening. The metallic material connects the surrounding wiring and the conductor region.
An electrical contacting between a surrounding wiring and a conductor region, the conductor region being situated in a conductor layer above an SOI wafer or SOI chip, a cover layer being situated above the conductor layer and below the surrounding wiring, the cover layer having a contacting region, the contacting region being insulated from the rest of the cover layer by a first configuration of recesses, an opening is formed at least in the contacting region, a metallic material is situated in the opening, and the metallic material connects the surrounding wiring and the conductor region, wherein the conductor region is separated from a further conductor region by a second configuration of recesses, wherein the conductor region is insulated from the further conductor region by the second configuration of recesses.
A method for producing an electrical contacting between a surrounding wiring and a conductor region, the conductor region being situated in a conductor layer above an SOI wafer or SOI chip, a cover layer being situated above the conductor layer and below the surrounding wiring, the method comprising:
A system, comprising:
Dependencies are inferred from the claim text.