Laser processing device and laser processing method

A laser processing apparatus that emits a laser light with at least a part of a focusing region being on a target to form a modified region in the target, the laser processing apparatus comprising:

• a support portion configured to support the target;
• an irradiation portion configured to irradiate the target supported by the support portion with the laser light;
• and
• a controller configured to control the support portion and the irradiation portion, wherein
• the irradiation portion includes a shaping portion configured to shape the laser light, to make a shape of a part of the focusing region within a plane orthogonal to an optical axis of the laser light have a longitudinal direction, and
• the controller includes:
• a determination portion configured to determine, based on target information on the target and line information on a line extending annularly on an inner side of an outer edge of the target for relatively moving the part of the focusing region along the line, a first orientation that is an orientation of the longitudinal direction for relatively moving the part of the focusing region along a first region of the line, and a second orientation that is an orientation of the longitudinal direction for relatively moving the part of the focusing region along a second region of the line, to make the longitudinal direction intersect with a movement direction of the part of the focusing region;
• a processing controller configured to perform a first process of forming the modified region of relatively moving the part of the focusing region along the first region and stopping formation of the modified region in a region of the line other than the first region, and a second process of forming the modified region of relatively moving the part of the focusing region along the second region and stopping formation of the modified region in a region of the line other than the second region;
• and
• an adjustment portion configured to adjust the orientation of the longitudinal direction to be the first orientation when the processing controller performs the first process, and to adjust the orientation of the longitudinal direction to be the second orientation when the processing controller performs the second process.