Apparatus and method for processing substrate

An apparatus for processing a substrate, comprising:

• a base portion capable of horizontal rotation;
• a holding module located on the base portion and configured to hold a substrate;
• a nozzle module located above the base portion and configured to jet a chemical liquid onto the substrate on the holding module;
• and
• a scattering prevention module located on the base portion at a peripheral portion of the holding module and configured to, when the chemical liquid is scattered after being jetted onto the substrate, guide the scattered chemical liquid to be discharged by a variable movement of the scattering prevention module being moved inwardly or outwardly by a centrifugal force due to the horizontal rotation,
• wherein:
• the scattering prevention module includes a support portion supported on the base portion, a body portion provided on the peripheral portion of the holding module via the support portion, and a movable portion provided at an upper portion of the body portion and configured to be movable inwardly or outwardly to perform the variable movement,
• the movable portion performs the variable movement based on rotation between an internal side and an outer side of the body portion and the centrifugal force, wherein a degree to which the chemical liquid is scattered from the substrate is increased in response to a rotation speed of the base portion,
• a degree of the variable movement of the movable portion is increased in response to the rotation speed of the base portion,
• the movable portion is formed in a shape rounded outwardly,
• the movable portion further includes a first movable member directly interlocked with the base portion and a second movable member rotatably provided at an upper portion of the first movable member and configured to perform the variable movement based on the centrifugal force, and
• the movable portion includes a third movable member rotatably provided at an upper portion of the second movable member and configured to perform the variable movement based on the centrifugal force.