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US 11,896,934 B2Granted
Porous polymeric membrane with tear prevention ring
AssigneeGlobal Life Sciences Solutions Operations UK Ltd
InventorsDouglas Albagli, William A. Hennessy
Life of this patent
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Abstract
Porous liquid-filtering membranes are provided having a boundary region substantially surrounding the pore region and having greater tear resistance than the pore region.
Claims12
A method for making a tear-resistant liquid-filtering porous membrane comprising:
- a) depositing a photoresist layer on the top surface of a substrate, the substrate comprising a support layer, a polymer layer, and a hard mask layer;
- b) exposing the photoresist to a pattern of light;
- c) developing the photoresist layer to provide a first pattern of openings in the photoresist layer that expose portions of the hard mask layer;
- d) etching the exposed portions of the hard mask layer to provide a second pattern of openings in the hard mask layer that expose portions of the underlying polymer layer;
- e) removing the photoresist;
- f) etching the polymer layer through the second pattern of openings in the hard mask layer thereby providing a third pattern of openings in the polymer layer, the third pattern of openings including a pore region and a segmentation region surrounding the pore region with a tear-resistant boundary region between the pore-region and the segmentation region, the pore region comprising a plurality of pores having a minimum dimension of less than 100 microns;
- g) removing the hard mask layer;
- and,
- h) releasing the polymer layer from the substrate, thereby providing the tear- resistant liquid-filtering porous membrane, wherein the pore region and the tear-resistant boundary region are defined by the pattern of light.
6 more elements
Dependencies are inferred from the claim text.