Laser device and dehumidification management method for laser device

A dehumidification management method for a laser device including a laser oscillator, a dehumidifier for dehumidifying the inside of the laser oscillator, and a controller,

• wherein the controller is configured to control the dehumidifier such that a dew point inside the laser oscillator meets a condition one and a condition two,
• wherein the condition one is when the dew point inside the laser oscillator is lower than a first dew point at which a monolayer or less of water molecules is adsorbed, and
• wherein the condition two is when the dew point inside the laser oscillator is equal to or higher than a second dew point at which more than a monolayer of water molecules is adsorbed inside the laser oscillator and lower than a third dew point at which dew condensation starts to occur inside the laser oscillator,
• wherein the first dew point is a value corresponding to an upper limit value of water vapor pressure in a state in which a monolayer or less of water molecules is adsorbed inside the laser oscillator,
• wherein the second dew point is a value corresponding to or higher than a lower limit value of water vapor pressure in a state in which more than a monolayer of water molecules is adsorbed inside the laser oscillator, and
• wherein the third dew point is a value corresponding to an upper limit value of water vapor pressure in a state in which more than a monolayer of water molecules is adsorbed inside the laser oscillator and being higher than the second dew point.

A laser device comprising:

• a laser oscillator;
• a dehumidifier for dehumidifying inside of the laser oscillator;
• and
• a controller controlling an operation of the dehumidifier,
• wherein the controller is configured to control the dehumidifier such that water vapor pressure inside the laser oscillator meets a condition one and a condition two,
• wherein the condition one is when water vapor pressure inside the laser oscillator is lower than a first water vapor pressure at which a monolayer or less of water molecules is adsorbed, and
• wherein the condition two is when water vapor pressure inside the laser oscillator is equal to or higher than a second water vapor pressure at which more than a monolayer of water molecules is adsorbed inside the laser oscillator and lower than a third water vapor pressure at which dew condensation starts to occur inside the laser oscillator.