Vibrating deposition device
AssigneeSky Tech Inc.
InventorJing-Cheng Lin
Life of this patent
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Abstract
The invention provides a vibrating deposition device, which includes a vacuum chamber, a fixed rod and a powder tank. The vacuum chamber includes an inner side surface, and a plurality of bulges and notches are arranged on the inner side surface. The fixed rod and the powder tank are arranged in an accommodating space of the vacuum chamber, wherein the powder tank is used for accommodating powders and contacts the inner side surface of the vacuum chamber through a protruding unit. When the vacuum chamber rotates, the protruding unit will be displaced between the bulge and the notch, and the powder tank will be displaced up and down relative to the vacuum chamber to vibrate powders in the powder tank, so that a uniform film will be formed on the surface of powders.
Claims20
A vibrating deposition device, comprising:
- a vacuum chamber comprising an inner side surface, a first base and a second base, wherein the first base and the second base are respectively disposed two sides of the inner side surface forming a reaction space, wherein the inner side surface is provided with a plurality of bulges and a plurality of notches;
- a fixed rod located in the reaction space of the vacuum chamber, wherein the vacuum chamber is rotatable relative to the fixed rod;
- a powder tank located in the reaction space of the vacuum chamber, and comprising:
- a box body for accommodating powders, and connected to the fixed rod through a connecting bracket;
- and
- at least one protruding unit located on an outer surface of the box body, and contacting the inner side surface of the vacuum chamber, wherein when the vacuum chamber rotates relative to the fixed rod and the powder tank, the bulges and the notches on the inner side surface will move relative to the protruding unit of the box body, so that the powder tank is displaced up and down relative to the vacuum chamber to vibrate the powders in the box body.
A vibrating deposition device, comprising:
- a vacuum chamber comprising an inner side surface, a first base and a second base, wherein the first base and the second base are respectively disposed two sides of the inner side surface forming a reaction space;
- a fixed rod located in the of the reaction space of the vacuum chamber, wherein the vacuum chamber is rotatable relative to the fixed rod;
- a powder tank located in the reaction space of the vacuum chamber, and comprising:
- a box body for accommodating powders, and connected to the fixed rod through a connecting bracket;
- and
- at least one rotating wheel connected to the box body, and at least one bulge arranged on a surface of the rotating wheel, wherein the rotating wheel contacts the inner side surface of the vacuum chamber, when the vacuum chamber rotates relative to the fixed rod, the rotating wheel will rotate relative to the box body and the inner side surface of the vacuum chamber, so that the powder tank will be displaced up and down relative to the vacuum chamber to vibrate the powders in the box body.
Dependencies are inferred from the claim text.