Multi strain gauges sensor for improved performance
AssigneeEzmems Ltd.
InventorsTsvi Shmilovich, Nicola Molinazzi
Life of this patent
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Abstract
A sensor device including a deformable substrate and a plurality of sensing elements formed on or in the deformable substrate, each of the plurality of sensing elements including at least one of a plurality of strain sensitive lines radially extending with respect to a center of the sensor device and a plurality of strain sensitive lines extending along a circular section with respect to the center of the sensor device, and one or more electrically conducting vias formed in the deformable substrate for electrically connecting between one or more of the sensing elements formed on the first side of the deformable substrate and one or more of the sensing elements formed on the second side of the deformable substrate.
Claims20
A sensor device comprising:
- a deformable substrate;
- a plurality of sensing elements formed on or in first and second sides of said deformable substrate, each of said plurality of sensing elements comprises at least one of the following:
- (i) a plurality of strain sensitive lines radially extending with respect to a center of the sensor device;
- and (ii) a plurality of strain sensitive lines extending along a circular section with respect to the center of the sensor device;
- and
- one or more electrically conducting vias formed in said deformable substrate for electrically connecting between one or more of the sensing elements formed on said first side of said deformable substrate and one or more of the sensing elements formed on said second side of said deformable substrate.
A sensor device comprising:
- a deformable substrate;
- and
- a plurality of sensing elements formed on or in first and second sides of said deformable substrate, each of said plurality of sensing elements comprises at least one of the following:
- (i) a plurality of strain sensitive lines radially extending with respect to a center of the sensor device;
- and (ii) a plurality of strain sensitive lines extending along a circular section with respect to the center of the sensor device,
- wherein at least some portions of the strain sensitive lines of the sensing elements located on or in the first side of the deformable substrate are perpendicularly oriented with respect to at least some portions of the strain sensitive lines of the sensing elements located on or in the second side of the deformable substrate.
A sensor device comprising:
- a deformable substrate;
- first and second piezoresistive layers respectively patterned on or in first and second sides of said deformable substrate to thereby form a plurality of sensing elements, each of said plurality of sensing elements comprises at least one of the following:
- (i) a plurality of strain sensitive lines radially extending with respect to a center of the sensor device;
- and (ii) a plurality of strain sensitive lines extending along a circular section with respect to the center of the sensor device;
- and
- first and second electrically conducting layers respectively patterned on or in said first and second sides of the deformable substrate with some overlap with said at least one piezoresistive layer, so as to provide electrical connectivity to and/or between said plurality of sensing elements and thereby facilitate construction of either a single bridge circuitry using sensing elements on or in said first and second sides of the deformable substrate, or a plurality of bridge circuitries each using sensing elements on or in at least one of said first and second sides of the deformable substrate.
Dependencies are inferred from the claim text.