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US 11,885,004 B2Granted
Mask device and evaporation device
AssigneesWuhan Tianma Microelectronics Co., Ltd., Wuhan Tianma Microelectronics Co., Ltd. Shanghai Branch
InventorsNaichao Mu, Yuan Li, Yu Xin, Jun Ma, Lijing Han
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Abstract
The disclosure discloses a mask device and an evaporation device, so as to manufacture a special-shaped display panel, improve the manufacturing efficiency of the special-shaped display panel and lower the cost. The mask device provided by the embodiment of the present disclosure comprises a framework and a first strip plate, where the first strip plate is fixed on the framework and extends along the first direction, the first strip plate includes a first area and a second area, and the width of the first area is greater than the width of the second area in the direction parallel to the surface of the first strip plate and vertical to the first direction.
Claims28
A mask module, comprising:
- a framework;
- and
- a first strip plate fixed on the framework and extending along a first direction, wherein the first strip plate comprises a first area and a second area, and a width of the first area is greater than a width of the second area in a second direction parallel to a contact surface of the first strip plate and the framework and vertical to the first direction;
- and
- the first strip plate is provided with a first concave-convex structure on one side edge along the first direction, and a second concave-convex structure on another side edge;
- wherein the first concave-convex structure comprises an arc-shaped structure at two ends of the first concave-convex structure along the first direction;
- wherein the second concave-convex structure comprises an arc-shaped structure at two ends of the second concave-convex structure along the first direction, and comprises one raised structure in a middle of the second concave-convex structure along the first direction;
- wherein two ends of the one raised structure along the first direction are arched and convex;
- wherein the one raised structure protrudes along the second direction away from the first concave-convex structure on a same first strip plate;
- wherein the arc-shaped structure of the first concave-convex structure is arranged at a first surface, the arc-shaped structure and the one raised structure of the second concave-convex structure are arranged at the first surface, and the first surface is parallel to the contact surface of the first strip plate and the framework;
- wherein the one raised structure is symmetrical along a first axis of symmetry in the second direction;
- and the first concave-convex structure is symmetrical along a second axis of symmetry in the second direction;
- wherein the first axis of symmetry and the second axis of symmetry coincide;
- wherein the one raised structure and the first strip plate are an integral structure and made of a same material.
11 more elements
A mask module, comprising:
- a framework;
- a first strip plate fixed on the framework and extending along a first direction;
- and
- a first mask located on a side, deviating from the framework, of the first strip plate, wherein the first mask comprises at least one preset area, and the preset area comprises at least one opening area;
- wherein:
- the first strip plate comprises a first area and a second area, and a width of the first area is greater than a width of the second area in a second direction parallel to a contact surface of the first strip plate and the framework and vertical to the first direction;
- and
- the first strip plate is provided with a first concave-convex structure on one side edge along the first direction, and a second concave-convex structure on another side edge;
- wherein the first concave-convex structure comprises an arc-shaped structure at two ends of the first concave-convex structure along the first direction;
- wherein the second concave-convex structure comprises an arc-shaped structure at two ends of the second concave-convex structure along the first direction, and comprises one raised structure in a middle of the second concave-convex structure along the first direction;
- wherein the one raised structure is at least partially located in the at least one opening area of the first mask;
- wherein two ends of the one raised structure along the first direction are arched and convex;
- wherein the one raised structure protrudes along the second direction away from the first concave-convex structure on a same first strip plate;
- wherein the arc-shaped structure of the first concave-convex structure is arranged at a first surface, the arc-shaped structure and the one raised structure of the second concave-convex structure are arranged at the first surface, and the first surface is parallel to the contact surface of the first strip plate and the framework;
- wherein the one raised structure is symmetrical along a first axis of symmetry in the second direction;
- and the first concave-convex structure is symmetrical along a second axis of symmetry in the second direction;
- wherein the first axis of symmetry and the second axis of symmetry coincide;
- wherein the one raised structure and the first strip plate are an integral structure and made of a same material.
15 more elements
Dependencies are inferred from the claim text.