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US 11,854,801 B2Granted
Method and device for depositing a nano-object
AssigneesCentre National De La Recherche Scientifique, Ecole Normale Superieure, Sorbonne Universite, Universite De Paris
InventorsMatthieu Delbecq, Tino Cubaynes, José Palomo, Matthieu Dartiailh, Takis Kontos, Matthieu Desjardins
Life of this patent
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Abstract
A method for depositing an object, including: —approaching, in an enclosure, a holder in the direction of a carrier substrate, then—transferring, in the enclosure, the object from the holder to an area for depositing the carrier substrate. The transfer step is preferably carried out when the inside of the enclosure is in a vacuum at a pressure below 10−6 bar.
Claims32
A method for depositing an object, comprising:
- an approach, of a comb in an enclosure, in the direction of a carrier substrate, the comb comprising at least two teeth, wherein a pair of adjacent teeth carries an object to be transferred, extended between the two teeth of the pair;
- then
- a transfer, in the enclosure, of the object from the comb and to a deposit area of the carrier substrate while the deposit area is inserted between the two teeth of the pair;
- and
- the transfer step is carried out while the inside of the enclosure is under vacuum at a pressure less than 10−6 bar.
2 more elements
A device for depositing an object comprising:
- an enclosure;
- means arranged for carrying, in a comb area, a comb comprising at least two teeth;
- means arranged to carry a substrate in a deposit area;
- evacuation means, arranged to create a vacuum in the enclosure at a pressure less than 10−6 bar;
- and
- handling means arranged to approach the comb area, in the enclosure, in the direction of the deposit area, so as to allow a transfer, in the enclosure, of an object, from the comb area to the deposit area;
- characterized in that the handling means are arranged to approach the comb area, in the enclosure, in the direction of the deposit area, so as to allow a transfer, in the enclosure, of an object, from the comb area to the deposit area while the inside of the enclosure is under vacuum, at a pressure less than 10−6 bar, created by the evacuation means.
4 more elements
Dependencies are inferred from the claim text.