Photosensitive polyimide compositions
AssigneeFujifilm Electronic Materials U.S.A., Inc.
InventorsSanjay Malik, Raj Sakamuri, Ognian N. Dimov, Binod B. De, William A. Reinerth, Ahmad A. Naiini
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Abstract
This disclosure relates to a photosensitive composition that includes at least one fully imidized polyimide polymer having a weight average molecular weight in the range of about 20,000 Daltons to about 70,000 Daltons; at least one solubility switching compound; at least one photoinitiator; and at least one solvent. The composition is capable of forming a film or a dry film having a dissolution rate of greater than about 0.15 micron/second using cyclopentanone as a developer.
Claims21
A photosensitive composition, comprising:
- at least one fully imidized polyimide polymer having a weight average molecular weight in the range of about 45,000 Daltons to about 70,000 Daltons;
- at least one solubility switching compound;
- at least one photoinitiator;
- and
- at least one solvent;
- wherein the at least one fully imidized polyimide polymer is prepared from monomers consisting essentially of at least one diamine and at least one dianhydride, the at least one diamine excludes a siloxane diamine, and the composition is capable of forming a film having a dissolution rate of greater than about 0.15 micron/second using cyclopentanone as a developer.
A photosensitive composition, comprising:
- at least one fully imidized polyimide polymer having a weight average molecular weight in the range of about 20,000 Daltons to about 70,000 Daltons;
- at least one solubility switching compound;
- at least one photoinitiator;
- and
- at least one solvent;
- wherein the at least one fully imidized polyimide polymer is prepared from monomers consisting essentially of at least one diamine and at least one dianhydride, the at least one diamine excludes a siloxane diamine, and the composition is capable of forming a film having a dissolution rate of greater than about 0.15 micron/second using cyclopentanone as a developer.
Dependencies are inferred from the claim text.