Liquid storage for facility chemical supply system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTzu-Yang Lin, Cheng-Han Wu, Chen-Yu Liu, Kuo-Shu Tseng, Shang-Sheng Li, Chen Yi Hsu, Yu-Cheng Chang
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Abstract
A lithography includes a storage tank that stores process chemical fluid, an anti-collision frame, and an integrated sensor assembly. The storage tank includes a dispensing port positioned at a lowest part of the storage tank in a gravity direction. The anti-collision frame is coupled to the storage tank. An integrated sensor assembly is disposed on at least one of the anti-collision frame and the storage tank to measure a variation in fluid quality in response to fluid quality measurement of fluid.
Claims16
A liquid supply system, comprising:
- a storage tank for storing a process chemical fluid, the storage tank including a dispensing port positioned at a lowest part of the storage tank in a gravity direction;
- an anti-collision frame coupled to the storage tank;
- and
- a spectrum analyzer located adjacent to the dispensing port of the storage tank to measure a variation in fluid quality in response to a fluid quality measurement of fluid, wherein a time delay between subsequent process chemical fluid supply and dispensing of the fluid is adjusted based on the variation in fluid quality measured by the spectrum analyzer;
- a feedback controller coupled to the spectrum analyzer and one or more valves controlling supply and dispense of the process chemical fluid associated with the liquid supply system;
- wherein the feedback controller is configured to adjust one or more parameters of the process chemical fluid and the valves based on a variation in output of the spectrum analyzer generated by the fluid.
A liquid supply system, comprising:
- a storage tank storing process chemical fluid, the storage tank including a liquid dispensing port positioned at a lowest part of the storage tank in a gravity direction;
- an anti-collision frame coupled to the storage tank;
- a spectrum analyzer located adjacent to the liquid dispensing port of the storage tank to measure a variation in fluid quality;
- and
- a feedback controller coupled to the spectrum analyzer and one or more of a process supply source, and fluidic control elements controlling supply and dispense of the process chemical fluid associated with the liquid supply system,
- wherein the feedback controller is configured to adjust a time delay between subsequent process chemical fluid supply and dispensing of the fluid based on the variation in fluid quality measured by the spectrum analyzer;
- wherein the feedback controller is configured to adjust one or more parameters of the process chemical fluid and the fluidic control elements based on a variation in output of the spectrum analyzer generated by the process chemical fluid.
A feedback control system of a liquid supply system, the liquid supply system including a storage tank for storing a process chemical fluid, the feedback control system comprising:
- a spectrum analyzer located adjacent to a dispensing port of the storage tank to measure a variation in fluid quality in response to a fluid quality measurement of fluid;
- and
- a feedback controller coupled to the spectrum analyzer and an adjustable fluidic element controlling supply and dispense of the process chemical fluid, wherein the feedback controller is configured to adjust a time delay between subsequent process chemical fluid supply and dispensing of the fluid based on the variation in fluid quality measured by the spectrum analyzer;
- wherein the liquid supply system further comprises an anti-collision frame coupled to the storage tank, and wherein the spectrum analyzer is disposed on the anti-collision frame to measure the variation in fluid quality in response to the fluid quality measurement of fluid;
- wherein the feedback controller is configured to adjust one or more parameters of the process chemical fluid and the adjustable fluidic element based on a variation in output of the spectrum analyzer generated by the fluid.
Dependencies are inferred from the claim text.