Imprint apparatus and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorTetsuji Okada
Life of this patent
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Abstract
An imprint apparatus that cures an imprint material on a substrate in a state where a mold is in contact with the imprint material includes a substrate holding unit having a plurality of holding regions that holds the substrate, and a control unit configured to control a pressure in each of the holding regions independently, wherein the control unit controls the pressure based on at least one of shape information and distortion information of the substrate, at least when the imprint material is cured.
Claims5
An imprint apparatus that cures a curable composition on a substrate in a state where a mold is in contact with the curable composition, the imprint apparatus comprising:
- a substrate holding unit having a plurality of holding regions that holds the substrate;
- and
- a control unit configured to control a pressure of the plurality of holding regions,
- wherein the control unit cures the curable composition in a state where the control unit controls the pressure so that a shape of a pattern portion of the mold and a shape of a shot region of the substrate coincide with each other, based on at least one of the shape information and the distortion information of the substrate measured by a measuring device.
Dependencies are inferred from the claim text.