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US 11,757,428 B2Granted
Electromechanical resonators based on metal-chalcogenide nanotubes
AssigneeYeda Research and Development Co. Ltd.
InventorsReshef Tenne, Ernesto Joselevich, Yiftach Divon, Roi Levi, Assaf Yaakobovitz, Dan Yudilevich
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Abstract
This invention provides electromechanical resonators based on metal chalcogenide nanotubes. The invention further provides methods of fabrication of electromechanical resonators and methods of use of such electromechanical resonators.
Claims9
A method of fabrication of an electromechanical resonator, said method comprising:
- providing a substrate;
- applying at least a first pad and a second pad onto said substrate such that said pads are not in contact with each other;
- applying at least one metal-chalcogenide nanotube onto said pads such that a first region of said nanotube is in contact with said first pad and a second region of said nanotube is in contact with said second pad;
- applying a pedal on top of said nanotube, such that said pedal is in contact with said nanotube, wherein said pedal is of a rectangular shape and is attached to said nanotube such that the longer dimension of said rectangle is positioned perpendicular to the longer dimension of said nanotube;
- and wherein said rectangular pedal is positioned asymmetrically with respect to said nanotube;
- and
- removing a substrate surface layer underneath said nanotube, thus suspending said nanotube over said substrate.
4 more elements
Dependencies are inferred from the claim text.