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US 11,728,136 B2Granted
RF pulsing within pulsing for semiconductor RF plasma processing
AssigneeLam Research Corporation
InventorsMaolin Long, Yuhou Wang, Ying Wu, Alex Paterson
Life of this patent
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Abstract
A system and method for generating a radio frequency (RF) waveform are described. The method includes defining a train of on-off pulses separated by an off state having no on-off pulses. The method further includes applying a multi-level pulse waveform that adjusts a magnitude of each of the on-off pulses to generate an RF waveform. The method includes sending the RF waveform to an electrode.
Claims20
A matchless plasma source comprising:
- a clock source configured to generate a clock signal;
- a pulsing circuit configured to generate a pulsing signal, wherein the clock signal has a frequency greater than a frequency of the pulsing signal;
- a filter coupled to the clock source and the pulsing circuit to filter the clock signal based on the pulsing signal, wherein the clock signal is filtered to output a filtered signal;
- a driver and amplification circuit coupled to the filter, wherein the driver and amplification circuit is configured to receive the filtered signal to output an amplified waveform;
- and
- a reactive circuit coupled to the driver and amplification circuit to remove harmonics from the amplified waveform to provide a sinusoidal waveform to an electrode.
3 more elements
A plasma tool comprising:
- a plasma chamber having an electrode;
- and
- a matchless plasma source coupled to the electrode, wherein the matchless plasma source includes:
- a clock source configured to generate a clock signal;
- a pulsing circuit configured to generate a pulsing signal, wherein the clock signal has a frequency greater than a frequency of the pulsing signal;
- a filter coupled to the clock source and the pulsing circuit to filter the clock signal based on the pulsing signal, wherein the clock signal is filtered to output a filtered signal;
- a driver and amplification circuit coupled to the filter, wherein the driver and amplification circuit is configured to receive the filtered signal to output an amplified waveform;
- and
- a reactive circuit coupled to the driver and amplification circuit to remove harmonics from the amplified waveform to provide a sinusoidal waveform to the electrode.
6 more elements
A method comprising:
- generating a clock signal;
- generating a pulsing signal, wherein the clock signal has a frequency greater than a frequency of the pulsing signal;
- filtering the clock signal based on the pulsing signal to output a filtered signal;
- receiving the filtered signal to output an amplified waveform;
- and
- removing harmonics from the amplified waveform to provide a sinusoidal waveform to an electrode.
3 more elements
Dependencies are inferred from the claim text.