Imprint method, imprint apparatus, determination method, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorSoushi Yamaguchi
Life of this patent
Estimating the term…
Abstract
The present invention provides an imprint method of forming a pattern of an imprint material on a substrate using a mold, the method including obtaining a state of a light blocking member provided outside a pattern region of the mold, the light blocking member being configured to block light, determining, based on the state of the light blocking member obtained in the obtaining, whether the mold is usable, and curing the imprint material by irradiating the imprint material with the light in a state in which the mold determined to be usable in the determining is in contact with the imprint material on the substrate.
Claims14
An imprint method of forming a pattern of an imprint material on a substrate using a mold, the method comprising:
- obtaining a state of a light blocking member provided outside a pattern region of the mold, the light blocking member being configured to block light;
- determining, based on the state of the light blocking member obtained in the obtaining, whether the mold is usable;
- and
- curing the imprint material by irradiating the imprint material with the light in a state in which the mold determined to be usable in the determining is in contact with the imprint material on the substrate.
An imprint apparatus for forming a pattern of an imprint material on a substrate using a mold, the apparatus comprising:
- an obtainment unit configured to obtain a state of a light blocking member provided outside a pattern region of the mold, the light blocking member being configured to block light;
- a determination unit configured to determine, based on the state of the light blocking member obtained by the obtainment unit, whether the mold is usable;
- and
- a processing unit configured to perform processing of curing the imprint material by irradiating the imprint material with the light in a state in which the mold determined to be usable by the determination unit is in contact with the imprint material on the substrate.
A determination method comprising:
- obtaining a state of a light blocking member provided outside a pattern region of a mold which is used when forming a pattern of an imprint material on a substrate, the light blocking member being configured to block light;
- and
- determining, based on the state of the light blocking member obtained in the obtaining, whether the mold is usable.
An article manufacturing method comprising:
- obtaining a state of a light blocking member provided outside a pattern region of a mold, the light blocking member being configured to block light;
- determining, based on the state of the light blocking member obtained in the obtaining, whether the mold is usable;
- forming a pattern of an imprint material on a substrate by curing the imprint material by irradiating the imprint material with the light in a state in which the mold determined to be usable in the determining is in contact with the imprint material on the substrate;
- processing the substrate on which the pattern is formed in the forming;
- and
- manufacturing an article from the processed substrate.
Dependencies are inferred from the claim text.