High temperature face plate for deposition application
AssigneeApplied Materials, Inc.
InventorsAmit Kumar Bansal, Saket Rathi, Tuan Anh Nguyen
Life of this patent
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Abstract
Embodiments of the disclosure relate to faceplates for a processing chamber. In one example, a faceplate includes a body having a plurality of apertures formed therethrough. A heating element is disposed within the body, and the heating element circumscribes the plurality of apertures. A support ring is disposed the body. The support ring circumscribes the heating element. The support ring includes a main body and a cantilever extending radially inward from the main body. The cantilever contacts the body of the faceplate.
Claims20
A faceplate for a processing chamber, comprising:
- a body having a plurality of apertures formed therethrough, the body comprising a first extension and a second extension each extending outward from an outer surface of the body, the first extension and the second extension together defining a recess;
- and
- a heating element disposed within the body, the heating element circumscribing the plurality of apertures.
A faceplate for a processing chamber, comprising:
- a body having a plurality of apertures formed therethrough, the body comprising a first extension and a second extension each extending outward from an outer surface of the body, the first extension and the second extension together defining a recess, each of the first extension and the second extension have a greater thickness at a radially inward edge thereof compared to a radially outward edge thereof;
- and
- a heating element disposed within the body, the heating element circumscribing the plurality of apertures, the heating element located radially inward of the first extension and the second extension.
A faceplate for a processing chamber, comprising:
- a body having a plurality of apertures formed therethrough extending from a first surface to a second surface, the body comprising a first extension and a second extension each extending outward from a perimeter of the body in a direction parallel to the first surface and the second surface, the first extension and the second extension together defining a recess, and wherein sidewalls of the recess comprise stepped surfaces oriented towards one another;
- and
- a heating element disposed within the body, the heating element circumscribing the plurality of apertures.
Dependencies are inferred from the claim text.