Control apparatus, positioning apparatus, lithography apparatus, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorTakashi Kurihara
Life of this patent
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Abstract
A control apparatus for controlling a controlled object includes a measuring device configured to measure a state of the controlled object, and a controller configured to generate a manipulated variable corresponding to an output of the measuring device and a target value. The controller includes a compensator configured to output an index corresponding to the output of the measuring device and the target value, and a converter configured to convert the index into the manipulated variable such that a probability at which a predetermined manipulated variable is generated is a target probability.
Claims20
A control apparatus for controlling a controlled object, the control apparatus comprising:
- a measuring device configured to measure a state of the controlled object;
- and
- a controller configured to generate a manipulated variable corresponding to an output of the measuring device and a target value,
- wherein the controller includes:
- a compensator, including a neural network, configured to output an index corresponding to the output of the measuring device and the target value;
- and
- a converter configured to convert the index into the manipulated variable such that a probability at which a predetermined manipulated variable is generated is a target probability.
A control apparatus for controlling a controlled object, the control apparatus comprising:
- a measuring device configured to measure a state of the controlled object;
- and
- a controller configured to generate a manipulated variable corresponding to an output of the measuring device and a target value,
- wherein the controller includes:
- a compensator configured to output an index corresponding to the output of the measuring device and the target value;
- and
- a converter configured to convert the index into the manipulated variable such that a probability at which a predetermined manipulated variable is generated is a target probability,
- wherein the compensator includes a neural network including an input layer, a hidden layer, and an output layer, and
- wherein a parameter value of the neural network is determined by performing learning in a state in which a conversion rule for converting the index into the manipulated variable is set.
A control apparatus for controlling a controlled object, the control apparatus comprising:
- a measuring device configured to measure a state of the controlled object;
- a first controller configured to generate a first manipulated variable corresponding to an output of the measuring device and a target value;
- a second controller configured to generate a second manipulated variable corresponding to the output and the target value;
- and
- a calculator configured to generate a manipulated variable for manipulating the controlled object based on the first manipulated variable and the second manipulated variable,
- wherein the second controller includes:
- a compensator configured to output an index corresponding to the output and the target value;
- and
- a converter configured to convert the index into the second manipulated variable in accordance with a conversion rule, and
- wherein the conversion rule is a conversion rule corresponding to a probability distribution of the first manipulated variable when the controlled object is controlled in a mode by which the calculator generates the manipulated variable based on not the second manipulated variable but the first manipulated variable.
A control apparatus for controlling a controlled object, the control apparatus comprising:
- a measuring device configured to measure a state of the controlled object;
- a first controller configured to generate a first manipulated variable corresponding to an output of the measuring device and a target value;
- a second controller configured to generate a second manipulated variable corresponding to the output and the target value;
- a calculator configured to generate a manipulated variable for manipulating the controlled object based on the first manipulated variable and the second manipulated variable;
- and
- a setting device,
- wherein the second controller includes:
- a compensator configured to output an index corresponding to the output and the target value;
- and
- a converter configured to convert the index into the second manipulated variable in accordance with a conversion rule, and
- wherein the setting device sets the conversion rule in accordance with a probability distribution of the first manipulated variable when the controlled object is controlled in a mode by which the calculator generates the manipulated variable based on not the second manipulated variable but the first manipulated variable.
Dependencies are inferred from the claim text.