Pressure sensor including side-wall portion including shield electrode
AssigneeMurata Manufacturing Co., Ltd.
InventorsRyosuke Niwa, Koichi Yoshida
Life of this patent
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Abstract
A pressure sensor includes a base substrate, a first insulating layer at the base substrate, a stationary electrode at the first insulating layer, a side-wall portion around the stationary electrode at the first insulating layer, and a membrane having electrical conductivity, facing the stationary electrode across a space, and supported by the side-wall portion. The side-wall portion includes a shield electrode on the first insulating layer and a second insulating layer on the shield electrode. A distance between the stationary electrode and the membrane is less than a distance between the shield electrode and the membrane.
Claims12
A pressure sensor comprising:
- a base substrate;
- a first insulating layer at the base substrate;
- a stationary electrode at the first insulating layer;
- a side-wall portion provided around the stationary electrode at the first insulating layer;
- and
- a membrane having electrical conductivity, facing the stationary electrode across a space, supported by the side-wall portion;
- wherein
- the side-wall portion includes a shield electrode on the first insulating layer and a second insulating layer on the shield electrode;
- and
- a distance between the stationary electrode and the membrane is less than a distance between the shield electrode and the membrane.
Dependencies are inferred from the claim text.