US 11,690,276 B2Granted

Thin-film deposition mask assembly and method of fabricating organic light-emitting display panel using same

AssigneeLG Display Co., Ltd.

InventorsHyun Kyung Lee, Seyong Lee

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Abstract

Provided are a thin-film deposition mask assembly and a method of fabricating an organic light-emitting display panel using the same. A first mask includes a plurality of first openings disposed in odd columns and a plurality of second openings disposed in even columns. A single second opening disposed in an nth even column, among the plurality of second openings, is disposed between two first openings arranged in a first direction corresponding to row direction transverse to column direction and disposed in at least one column of (n−1)th and (n+1)th columns, among the plurality of first openings, where n is a natural number equal to or greater than 2. In some embodiments, the row direction and the column direction may be perpendicular to each other. The first mask is prevented from sagging.

Claims18

Dependent claims

A thin-film deposition mask assembly, comprising:

a first mask comprising a first base member having a plurality of openings provided in the first base member, each of the opening being spaced apart from each other;
a first frame holding the first mask;
a plurality of first openings disposed in odd columns included in the plurality of openings of the first mask;
and
a plurality of second openings disposed in even columns included in the plurality of openings of the first mask, the odd and even columns being arranged in a column direction;
wherein a single second opening is disposed in an nth even column, among the plurality of second openings, the second opening being disposed between two first openings arranged in a first direction corresponding to a row direction, the row direction being transverse to the column direction and disposed in at least one column of (n−1)th and (n+1)th columns, among the plurality of first openings, where n is a natural number equal to or greater than 2,
wherein a first distance between adjacent first openings of the plurality of first openings in the first direction is substantially the same as a second distance between adjacent second openings of the plurality of second openings in the first direction,
wherein a third distance between adjacent first openings of the plurality of first openings in a second direction overlapping the first direction is substantially the same as a fourth distance between adjacent second openings of the plurality of second openings in the second direction, and
wherein each of the first distance and the second distance is greater than each of the third distance and the fourth distance.

6 more elements

A thin-film deposition mask assembly, comprising:

a mask comprising a base member having a plurality of openings provided in the base member, each of the opening being spaced apart from each other;
a frame holding the mask;
a plurality of first openings disposed in odd columns included the plurality of openings of the mask;
and
a plurality of second openings disposed in even columns included the plurality of openings of the mask, the odd and even columns being arranged in a column direction;
wherein a single first opening disposed in an mth odd column, among the plurality of first openings, the first opening being disposed between two second openings arranged in a first direction corresponding to a row direction, the row direction being transverse to the column direction and disposed in an (m+1)th column, among the plurality of second openings, where m is a natural number equal to or greater than 1,
wherein a first distance between adjacent first openings of the plurality of first openings in the first direction is substantially the same as a second distance between adjacent second openings of the plurality of second openings in the first direction,
wherein a third distance between adjacent first openings of the plurality of first openings in a second direction overlapping the first direction is substantially the same as a fourth distance between adjacent second openings of the plurality of second openings in the second direction, and
wherein each of the first distance and the second distance is greater than each of the third distance and the fourth distance.

6 more elements

A method of fabricating an organic light-emitting display panel including a substrate having a plurality of first emission areas, a plurality of second emission areas, and a plurality of third emission areas spaced apart from each other on the substrate, the method comprising:

disposing a thin-film deposition mask assembly over the substrate, the thin-film deposition mask assembly having a plurality of first openings disposed in odd columns of the thin-film deposition mask assembly disposed to correspond to odd-numbered first emission areas among the plurality of first emission areas arranged in a first direction and the plurality of second openings disposed in even columns of the thin-film deposition mask assembly disposed to correspond to even-numbered first emission areas among the plurality of first emission areas arranged in the first direction;
and
supplying an organic layer material to the substrate through the plurality of first and second openings of the thin-film deposition mask assembly.

Dependencies are inferred from the claim text.

Facts

Application: 17/129,071Filed 21 Dec 2020
Priority: KR 10-2019-017975631 Dec 2019
Published: US 2021/0202852 A11 Jul 2021
Granted: 27 Jun 2023
Term ends: Not estimatedThe source records don’t support an estimate.

Classification5 codes

C23C 14/042
Coating on selected surface areas, e.g. using masks: using masks
C23C 14/12
Characterised by the coating material: organic material
H10K 71/166
Using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering: using selective deposition, e.g. using a mask
C23C
Coating metallic material