Apparatus and method of generating a waveform

A method for generating high voltage waveforms within a plasma, the method comprising:

• generating a first pulse burst comprising a first plurality of high voltage pulses, each pulse of the first plurality of pulses having a pulse width and a voltage greater than 500 V, the first pulse burst having a first burst period;
• charging a generator inductor with the first pulse burst;
• outputting a first output pulse having a first output pulse width and a first output voltage, the first output pulse width being substantially equal to the first burst period and the first output voltage being substantially proportional to the pulse width of each of the first plurality of pulses;
• generating a second pulse burst comprising a plurality of high voltage pulses, each pulse of the second plurality of pulses having a pulse width, the second pulse burst having a second burst period;
• charging a generator inductor with the second pulse burst;
• and
• outputting a second output pulse having a first output pulse width and a second output voltage, the second output pulse width being substantially equal to the second burst period and the second output voltage being substantially proportional to the pulse width of each of the second plurality of pulses.

A high voltage waveform generator comprising:

• a generator inductor;
• a high voltage nanosecond pulser having one or more solid state switches electrically coupled with the generator inductor, the high voltage nanosecond pulser configured to produce a pulse burst having a burst period, the pulse burst comprising a plurality of pulses having different pulse widths;
• and
• a plasma electrically coupled with the high voltage nanosecond pulser and the generator inductor, the voltage across the plasma having an output pulse with a pulse width substantially equal to the burst period and the voltage across the plasma varying in a manner that is substantially proportional with the pulse widths of the plurality of pulses.