Compensating control signal for raster scan of a scanning probe microscope

A measuring device for a scanning probe microscope, comprising

• a sample receptacle that is configured to receive a measurement sample to be examined;
• a measuring probe that is arranged on a probe holder and that has a probe tip with which the measurement sample can be measured;
• a displacement device that is configured to move the measuring probe and the sample receptacle relative to each other, in order to measure the measurement sample, in such a manner that the measuring probe, in order to measure the measurement sample, executes a raster movement relative to said measurement sample in at least one spatial direction;
• a control device that is connected to the displacement device and controls the relative movement between the measuring probe and the sample receptacle;
• and
• a sensor device that is configured to detect movement measurement signals for an actual movement of the measuring probe and/or the sample receptacle that is executed during the relative movement between the measuring probe and the sample receptacle in order to measure the measurement sample, and to relay the movement measurement signals to the control device, the movement measurement signals indicating a first movement component in a first spatial direction that disrupts the raster movement and a second movement component in a second spatial direction that disrupts the raster movement, which second spatial direction extends transversely to the first spatial direction;
• wherein the first movement component disrupting the raster movement and the second movement component disrupting the raster movement correspond to coupled movements in which the second movement component disrupting the raster movement is caused only by the first movement component disrupting the raster movement;
• and
• wherein the control device is further configured to control the relative movement between the measuring probe and the sample receptacle as a function of the movement measurement signals by a coupled control based on the coupled movements in such a manner that the displacement device is acted upon by the control device with compensating control signal components which, for the movement of the measuring probe and/or the sample receptacle, cause a first countermovement which substantially compensates for the first disruptive movement component in the first spatial direction, and/or cause a second countermovement which substantially compensates for the second disruptive movement component in the second spatial direction.