Transistor device with (anti)ferroelectric spacer structures
AssigneeIntel Corporation
InventorsJack Kavalieros, Ian Young, Matthew Metz, Uygar Avci, Chia-Ching Lin, Owen Loh, Seung Hoon Sung, Aditya Kasukurti, Sou-Chi Chang, Tanay Gosavi, Ashish Verma Penumatcha
Life of this patent
Estimating the term…