Apparatus for imprint lithography configured to generate a fluid droplet pattern and a method of using such apparatus

A method of generating a fluid drop pattern in imprint lithography, the method comprising:

• determining an initial fluid droplet pattern of fluid droplets of a formable material to be dispensed in one or more rows onto a substrate, wherein the fluid droplet pattern includes an imprint field, wherein the imprint field has an edge and a drop edge exclusion (DEE) along the edge;
• adjusting the initial fluid droplet pattern to an intermediate fluid droplet pattern, wherein adjusting the initial fluid droplet pattern comprises:
• determining a mean optimum DEE from two or more optimum DEEs;
• and
• moving the fluid droplet pattern relative the imprint field by a distance corresponding to the mean optimum DEE;
• adjusting the intermediate fluid droplet pattern to an adjusted fluid droplet pattern, wherein the adjusted fluid droplet pattern comprises a linear density of a row along the edge that is different from the linear density of a row away from the edge;
• and
• dispensing fluid droplets of the formable material onto the substrate corresponding to the adjusted fluid droplet pattern.

A method of manufacturing an article using a method of generating a fluid drop pattern in imprint lithography, the method of manufacturing the article comprising:

• determining an initial fluid droplet pattern of fluid droplets of a formable material to be dispensed in one or more rows onto a substrate, wherein the fluid droplet pattern includes an imprint field, wherein the imprint field has an edge and a drop edge exclusion (DEE) along the edge;
• adjusting the initial fluid droplet pattern to an intermediate fluid droplet pattern, wherein adjusting the initial fluid droplet pattern comprises:
• determining a mean optimum DEE from one or more optimum DEEs;
• and
• moving the fluid droplet pattern relative the imprint field by a distance corresponding to the mean optimum DEE;
• adjusting the intermediate fluid droplet pattern to an adjusted fluid droplet pattern, wherein the adjusted fluid droplet pattern comprises a linear density of a row along the edge that is different from the linear density of a row away from the edge;
• dispensing fluid droplets of the formable material onto the substrate corresponding to the adjusted fluid droplet pattern;
• contacting the dispensed formable material with a template;
• solidifying the formable material under the template;
• separating the template from the solidified formable material to form a film layer on the substrate;
• and
• processing the substrate on which the film layer is produced to manufacture the article.