Device and method for operating a bending beam in a closed control loop
AssigneeCarl Zeiss SMT GmbH
InventorsChristof Baur, Florian Demski
Life of this patent
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Abstract
The present invention relates to a device for operating at least one bending beam in at least one closed control loop, wherein the device has: (a) at least one first interface designed to receive at least one controlled variable of the at least one control loop; (b) at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth greater than the bit depth of the controlled variable; and (c) at least one second interface designed to provide a manipulated variable of the at least one control loop.
Claims21
A device for operating at least one bending beam in at least one closed control loop, the device comprising:
- a. at least one first interface designed to receive at least one controlled variable of the at least one control loop;
- b. at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth that is greater than the bit depth of the controlled variable, the programmable logic circuit further being designed to operate the at least one bending beam in at least two of the following operating modes:
- a contact mode, a non-contact mode, an intermittent mode and a step-in mode, and the programmable logic circuit moreover being designed to switch over between at least two of the operating modes of the bending beam without losing control over a position of the bending beam;
- and
- c. at least one second interface designed to provide a manipulated variable of the at least one control loop;
- wherein the bit depth of the control loop corresponds to the number of bits used to represent integers in a range in a binary representation of the control loop, and the bit depth of the controlled variable corresponds to the number of bits used to represent integers in a range in a binary representation of the controlled variable.
A method for operating at least one bending beam in at least one closed control loop, the method having the steps of:
- a. receiving at least one controlled variable of the at least one control loop;
- b. using at least one programmable logic circuit to process a control error of the at least one control loop using a bit depth that is greater than the bit depth of the controlled variable;
- c. providing a manipulated variable of the at least one control loop;
- d. the programmable logic circuit operating the at least one bending beam in at least two of the following operating modes:
- a contact mode, a non-contact mode, an intermittent mode and a step-in mode;
- and
- e. the programmable logic circuit switching over between at least two of the operating modes of the bending beam without losing control over a position of the bending beam;
- wherein the bit depth of the control loop corresponds to the number of bits used to represent integers in a range in a binary representation of the control loop, and the bit depth of the controlled variable corresponds to the number of bits used to represent integers in a range in a binary representation of the controlled variable.
Dependencies are inferred from the claim text.