Optical element, spectroscopic apparatus, and method for manufacturing the same
AssigneeCanon Kabushiki Kaisha
InventorsYukiya Enokida, Masatsugu Koyama, Yukinobu Okura
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Abstract
An optical element formed of a plurality of materials includes a middle layer between a base material and a reflecting member so as to suppress stripping, cracking and the like of the optical surface due to the difference in coefficients of thermal expansion among the component materials, in the case where a temperature difference in the service environment or a temperature difference between a manufacturing environment and the service environment is large.
Claims20
A manufacturing method of an optical element, wherein the optical element comprises a middle layer between a base and a reflecting layer, the middle layer having an intermediate thermal expansion coefficient that is between a thermal expansion coefficient of the base and a thermal expansion coefficient of the reflecting layer, the method comprising:
- forming the middle layer;
- forming a plurality of concave-convex structures in the middle layer;
- and
- forming the reflecting layer on the plurality of concave-convex structures,
- wherein the middle layer is formed by a copper sulfate plating.
A manufacturing method of an optical element, wherein the optical element comprises a middle layer between a base and a reflecting layer, the middle layer having an intermediate thermal expansion coefficient that is between a thermal expansion coefficient of the base and a thermal expansion coefficient of the reflecting layer, the method comprising:
- forming the middle layer;
- forming a plurality of concave-convex structures in the middle layer;
- and
- forming the reflecting layer on the plurality of concave-convex structures,
- wherein the middle layer comprises a plurality of stacked layers, and
- wherein the plurality of layers are formed from respectively different materials.
A manufacturing method of an optical element, the method comprising:
- forming a plated film by a copper sulfate plating on a base;
- forming a plurality of concave-convex structures in the plated film;
- and
- forming a reflecting film on the plurality of concave-convex structures,
- wherein a layer having the plurality of concave-convex structures is between the base and the reflecting film.
Dependencies are inferred from the claim text.