Pellicle and method for producing the same
AssigneeShin-Etsu Chemical Co., Ltd.
InventorAkinori Nishimura
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Abstract
The present invention is to provide a pellicle characterized by including a pellicle film and a pellicle frame, in which the pellicle film is stretched on the pellicle frame, and the pellicle film is an annealed pellicle film, and to provide a method for producing a pellicle by stretching a pellicle film on a pellicle frame, including the step of annealing the pellicle film alone before stretching the pellicle film on the pellicle frame, annealing the pellicle after stretching the pellicle film on the pellicle frame, or annealing the pellicle film alone and the pellicle both before and after stretching the pellicle film on the pellicle frame.
Claims15
A pellicle, comprising
- a pellicle film;
- and
- a pellicle frame,
- the pellicle film being stretched on the pellicle frame, and the pellicle film being an annealed pellicle film, wherein the temperature for the annealing treatment is from −30 to −10° C. of the glass transition temperature (Tg) of the pellicle film.
Dependencies are inferred from the claim text.