Crucible-supporting pedestal, quartz crucible-supporting device, and method for producing silicon single crystal
AssigneeSumco Corporation
InventorKenji Munezane
Life of this patent
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Abstract
A crucible-supporting pedestal includes a fitting recess portion into which a divided graphite member is fittable. An opening edge of the fitting recess portion is formed such that a contact area between the opening edge and the divided graphite member is provided at a position higher than a surface of a solidified product of a silicon melt which remains in a quartz crucible after a silicon single crystal is grown, and a force, which is applied to the divided graphite member by an expansion of the silicon melt when the silicon melt is solidified, is applied to a position lower than the contact area.
Claims16
A crucible-supporting pedestal that is attachable to a single crystal pulling-up apparatus for growing a single crystal from a silicon melt using a Czochralski process, and supports a plurality of divided graphite members which are obtained by vertically dividing a graphite crucible which supports a quartz crucible, the quartz crucible having a level at which level remaining silicon melt is solidified following operation, the crucible-supporting pedestal comprising:
- a fitting recess portion into which the plurality of divided graphite members are fittable,
- wherein an opening edge of the fitting recess portion is formed such that a contact area between the opening edge and the plurality of divided graphite members is provided at a position higher than the level at which level remaining silicon melt is solidified such that a force, which is applied to the plurality of divided graphite members by an expansion of remaining silicon melt in the case that the silicon melt is solidified, is applied to a position lower than the contact area.
Dependencies are inferred from the claim text.