Coating composition for use with an overcoated photoresist

A method for forming a photoresist relief image, the method comprising:

• applying a layer of a coating composition on a substrate;
• and
• disposing a layer of a photoresist composition on the layer of the coating composition,
• wherein the coating composition comprises an amine-containing polymer comprising a hydrocarbon-substituted amino group and having nitrogen atoms in an amount from 3 to 47 weight percent, based on a total weight of the amine-containing polymer,
• wherein the amine-containing polymer comprises a repeating structural unit represented by at least one of Formulae (3) or (4):
• wherein, in Formulae (3) and (4),
• R1 and R2 are each independently hydrogen, a substituted or unsubstituted C1-10 alkyl group, a substituted or unsubstituted C3-10 cycloalkyl group, or a substituted or unsubstituted C6-20 aryl group;
• Q2 is a substituted or unsubstituted aliphatic group, a substituted or unsubstituted cycloaliphatic group, a substituted or unsubstituted aromatic group, a substituted or unsubstituted heteroaromatic group, and combinations thereof, optionally with one or more linking moiety chosen from —O—, —N(Rb)—, —COO—, —CONRb—, —CONRb—, and —OCONRb—, and wherein Q2 is optionally a branching group connected to at least two repeat units represented by Formula (3);
• Ar is a substituted or unsubstituted C6-18 arylene group or a substituted or unsubstituted C3-18 heteroarylene group;
• X3 is a substituted or unsubstituted nitrogen-containing monocyclic, polycyclic, or fused polycyclic C2-7 heterocycloalkyl group or C3-30 heteroaryl group;
• Ra is hydrogen or a substituted or unsubstituted C1-30 alkyl group;
• and
• each Rb is independently hydrogen, a substituted or unsubstituted C1-30 alkyl group, a substituted or unsubstituted polycyclic or monocyclic C3-30 cycloalkyl group, or a substituted or unsubstituted polycyclic or monocyclic C6-30 aryl group.

A coating composition for use with an overcoated photoresist composition, the coating composition comprising an amine-containing polymer comprising a hydrocarbon-substituted amino group and having nitrogen atoms in an amount from 3 to 47 weight percent, based on a total weight of the amine-containing polymer,

• wherein the amine-containing polymer comprises a repeating structural unit represented by at least one of Formulae (1) or (2):
• wherein, in Formulae (1) and (2),
• R1 to R3 are each independently hydrogen, a substituted or unsubstituted C1-10 alkyl group, a substituted or unsubstituted C3-10 cycloalkyl group, or a substituted or unsubstituted C6-20 aryl group;
• L1 is a substituted or unsubstituted C1-30 alkylene group, a substituted or unsubstituted C2-30 alkenylene group, a substituted or unsubstituted C1-30 heteroalkene group, a substituted or unsubstituted C3-7 heterocycloalkylene group, a substituted or unsubstituted C6-30 arylene group, a substituted or unsubstituted C3-30 heteroarylene group, —O—, —C(═O)O—, —O(C═O)—, —CONRb—, or —OC(═O)NRb—;
• L2 is a single bond, a substituted or unsubstituted C1-30 alkylene group, a substituted or unsubstituted C2-30 alkenylene group, a substituted or unsubstituted C1-30 heteroalkene group, a substituted or unsubstituted C3-7 heterocycloalkylene group, a substituted or unsubstituted C6-30 arylene group, a substituted or unsubstituted C3-30 heteroarylene group, —(C(Rc)═N—(C2-3)alkylene)n-, —(NRb—(C2-3)alkylene)n-, or —(O—(C2-3)alkylene)n-;
• X1 is —N(Rb)2 or a substituted or unsubstituted nitrogen-containing monocyclic, polycyclic, or fused polycyclic C2-7 heterocycloalkyl group or C3-30 heteroaryl group;
• X2 is —C(Rc)═NRb, —N═C(Rc)2, —(NRb—(C2-3)alkylene)n-N(Rb)2, —(O—(C2-3)alkylene)n-N(Rb)2, or a substituted or unsubstituted nitrogen-containing monocyclic, polycyclic, or fused polycyclic C2-7 heterocycloalkyl group or C3-30 heteroaryl group;
• each Rb is independently hydrogen, a substituted or unsubstituted C1-30 alkyl group, a substituted or unsubstituted polycyclic or monocyclic C3-30 cycloalkyl group, or a substituted or unsubstituted polycyclic or monocyclic C6-30 aryl group;
• each Rc is independently hydrogen, a halogen, a cyano group, a nitro group, an amino group, a substituted or unsubstituted C1-30 alkyl group, a substituted or unsubstituted C2-30 alkenyl group, a substituted or unsubstituted C2-30 alkynyl group, a substituted or unsubstituted C1-30 alkoxy group, a substituted or unsubstituted C3-30 cycloalkyl group, a substituted or unsubstituted C3-30 cycloalkenyl group, a substituted or unsubstituted C6-30 aryl group, a substituted or unsubstituted C6-30 aryloxy group, a substituted or unsubstituted C6-30 arylthio group, or a substituted or unsubstituted C7-30 arylalkyl group;
• and
• each n is independently an integer from 1 to 20.

A coating composition for use with an overcoated photoresist composition, the coating composition comprising an amine-containing polymer comprising a hydrocarbon-substituted amino group and having nitrogen atoms in an amount from 3 to 47 weight percent, based on a total weight of the amine-containing polymer,

• wherein the amine-containing polymer comprises a repeating structural unit represented by at least one of Formulae (3) or (4):
• wherein, in Formulae (3) and (4),
• R1 and R2 are each independently hydrogen, a substituted or unsubstituted C1-10 alkyl group, a substituted or unsubstituted C3-10 cycloalkyl group, or a substituted or unsubstituted C6-20 aryl group;
• Q2 is a substituted or unsubstituted aliphatic group, a substituted or unsubstituted cycloaliphatic group, a substituted or unsubstituted aromatic group, a substituted or unsubstituted heteroaromatic group, and combinations thereof, optionally with one or more linking moiety chosen from —O—, —N(Rb)—, —COO—, —CONRb—, —CONRb—, and —OCONRb—, and wherein Q2 is optionally a branching group connected to at least two repeat units represented by Formula (3);
• Ar is a substituted or unsubstituted C6-18 arylene group or a substituted or unsubstituted C3-18 heteroarylene group;
• X3 is —N(Rb)2 or a substituted or unsubstituted nitrogen-containing monocyclic, polycyclic, or fused polycyclic C2-7 heterocycloalkyl group or C3-30 heteroaryl group;
• Ra is hydrogen or a substituted or unsubstituted C1-30 alkyl group;
• and
• each Rb is independently hydrogen, a substituted or unsubstituted C1-30 alkyl group, a substituted or unsubstituted polycyclic or monocyclic C3-30 cycloalkyl group, or a substituted or unsubstituted polycyclic or monocyclic C6-30 aryl group.