Three-dimensional memory devices with improved charge confinement and fabrication methods thereof
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsLei Xue, Lan Yao, Chia-Chann Shiue, Xiaoxin Liu
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AssigneeYangtze Memory Technologies Co., Ltd.
InventorsLei Xue, Lan Yao, Chia-Chann Shiue, Xiaoxin Liu
Estimating the term…
Embodiments of a three-dimensional (3D) memory device and method for forming the 3D memory device are provided. In an example, the 3D memory device includes a plurality of conductor layers extending over a substrate, a channel structure vertically extending through the conductor layers to the substrate, and a source structure extending through the conductor layers to the substrate. The channel structure may include a blocking layer having a plurality of blocking portions disconnected from one another. Each of the blocking portions may include (i) a vertical blocking portion under a respective conductor layer, and (ii) at least one lateral blocking portion covering a respective lateral surface of the respective conductor layer. The channel structure may also include a memory layer having a plurality of memory portions disconnected from one another, each of the memory portions under and in contact with the respective vertical blocking portion.
A method for forming a three-dimensional (3D) memory device, comprising:
A method for forming a three-dimensional (3D) memory device, comprising:
Dependencies are inferred from the claim text.