Shower head assembly and atomic layer deposition device

A shower head assembly for an integrated circuit manufacturing process, comprising:

• a first trapezoidal column component, having a first top edge, a first bottom edge and a first hollow part, wherein the first bottom edge has a first bottom dimension distance, the first bottom dimension distance is a first bottom diameter distance when the first trapezoidal column component is a first trapezoidal cylindrical column component, and the first bottom dimension distance is a first bottom diagonal distance when the first trapezoidal column component is a first trapezoidal prism component;
• a second trapezoidal column component, having a second top edge, a second bottom edge and a second hollow part, wherein the second top edge and the second bottom edge have a second vertical distance therebetween, the second top edge is connected to the first bottom edge of the first trapezoidal column component, and the second hollow part is communicated with the first hollow part;
• a column component, having a top edge, a column bottom part and multiple nozzles, wherein a top edge and the column bottom part has a column vertical distance therebetween, the column vertical distance is 2-3 cm, the top edge is connected to the second bottom edge of the second trapezoidal column component, the nozzles are communicated with the second hollow part, the nozzles are vertical runners in the column component, and openings of the nozzles are disposed on the column bottom part;
• wherein a total distance of the second vertical distance and the column vertical distance is less than the first bottom dimension distance.