Imprint template and imprint method
AssigneeBeijing BOE Technology Development Co., Ltd.
InventorKang Guo
Life of this patent
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Abstract
An imprint template and an imprint method are provided. The imprint template includes a base substrate, an imprinting pattern layer and a deformable layer; wherein the deformable layer is disposed on a surface of the imprinting pattern layer facing away from the base substrate, and a shape of a surface of the deformable layer facing away from the base substrate is identical to an equidistant expanded shape of a shape of a surface of the imprinting pattern layer facing away from the base substrate; the deformable layer is configured to have a variable thickness under an external stimulation.
Claims9
An imprint template, comprising:
- a base substrate, an imprinting pattern layer and a deformable layer;
- wherein the deformable layer is disposed on a side of the imprinting pattern layer facing away from the base substrate, an orthographic projection of the deformable layer on the base substrate completely covers an orthographic projection of the imprinting pattern layer on the base substrate, a shape of a surface of the deformable layer facing away from the base substrate is identical to an equidistant expanded shape of a shape of a surface of the imprinting pattern layer facing away from the base substrate, and the shape of the surface of the deformable layer facing away from the base substrate is identical to the equidistant expanded shape of the shape of the surface of the imprinting pattern layer facing away from the base substrate after a thickness of the deformable layer is changed;
- the deformable layer is configured to have a variable thickness under an external stimulation;
- wherein the deformable layer comprises:
- a first electrode layer, a second electrode layer, and an intermediate layer therebetween;
- the first electrode layer and the second electrode layer are configured to form an electric field when the first electrode layer and the second electrode layer are applied with different voltages, and the thickness of the deformable layer is increased under an action of the electric field;
- and are configured to restore the thickness of the deformable layer to an initial thickness when the different voltages applied on the first electrode layer and the second electrode layer are removed.
Dependencies are inferred from the claim text.