US 11,488,920 B2 · Silver nano-twinned thin film structure and method for forming the same

Abstract

A silver nano-twinned thin film structure and a method for forming the same are provided. A silver nano-twinned thin film structure, including: a substrate; an adhesive-lattice-buffer layer over the substrate; and a silver nano-twinned thin film over the adhesive-lattice-buffer layer, wherein the silver nano-twinned thin film comprises parallel-arranged twin boundaries, and a cross-section of the silver nano-twinned thin film reveals that 50% or more of all twin boundaries are parallel-arranged twin boundaries, wherein the parallel-arranged twin boundaries include Σ3 and Σ9 boundaries, wherein the Σ3 and Σ9 boundaries include 95% or more crystal orientation.

Claims15

Dependent claims

A silver nano-twinned thin film structure, comprising:

a substrate;
an adhesive-lattice-buffer layer over the substrate;
and
a silver nano-twinned thin film over the adhesive-lattice-buffer layer, wherein the silver nano-twinned thin film comprises parallel-arranged twin boundaries, and a cross-section of the silver nano-twinned thin film reveals that 50% or more of all twin boundaries are parallel-arranged twin boundaries, wherein the parallel-arranged twin boundaries comprise Σ3 and Σ9 boundaries, wherein the Σ3 and Σ9 boundaries comprise 95% or more [111] crystal orientation.

1 more element

Dependencies are inferred from the claim text.

Facts

Application

16/844,972Filed 9 Apr 2020

Priority

TW 10910206221 Jan 2020

Published

US 2021/0225793 A122 Jul 2021

Granted

1 Nov 2022

Term ends

Not estimatedThe source records don’t support an estimate.

Classification18 codes

H10W 72/30
Interconnections or connectors in packages: die-attach connectors
H10W 72/90
Interconnections or connectors in packages: bond pads, in general
H10W 72/013
Manufacture or treatment: of die-attach connectors
H10W 72/01338
Using blanket deposition: in gaseous form, e.g. by CVD or PVD

Silver nano-twinned thin film structure and method for forming the same

Life of this patent

Silver nano-twinned thin film structure and method for forming the same

Life of this patent

Abstract

Claims15